Iimveliso
i-vacuum suction manipulator ye-pneumatic
Izinto eziluncedo zokuphakamisa ingalo
Ii-manipulators zevacuum zisetyenziselwa ukuhambisa okanye ukubeka i-wafer okanye izinto kumagumbi akhethekileyo okufunxa kunye nokuphatha izixhobo zokusebenza.Banikezela ukuguquguquka okwandisiweyo ngenxa yokuba amakhonkco aqinileyo awasetyenziswanga.Ezinye ii-vacuum manipulators ziquka izixhobo zokukhwela okanye iziphumo zokugqibela.Ezinye zibandakanya izitshixo zomthwalo kunye neentonga ezishukumayo.Ngokuqhelekileyo, i-vacuum manipulators isetyenziswa ngokubambisana namagumbi okucoca.Iziphatho zeWafer okanye iirobhothi luhlobo oluzenzekelayo lwe-vacuum manipulators yokuhambisa iiwafers okanye iisubstrates zibe okanye ziphume kwi-PVD, i-CVD, i-plasma etching okanye amanye amagumbi okucoca i-vacuum.Ukwenza igumbi lokucoca, i-vacuum motor okanye i-vacuum motor impompa ngokwasemzimbeni umoya usuka kwinqanawa de kufike uxinzelelo olufunwayo lomoya ongaphantsi komhlaba.Ukuba igumbi lokucoca liqulethe i-vacuum ephezulu kakhulu, ngoko ke kufuneka kusetyenziswe i-ultra-high vacuum manipulator kunye ne-ultra-high vacuum motor.
Iimpawu zemveliso
1. Uyilo olulodwa lwe-sucker lunokwenza ukuba into iphakame okanye iwe ngokuthanda kwayo, kodwa iphinde ijikeleze nakweliphi na icala lesihlalo esisisigxina se-sucker ukwenza umsebenzi ube lula kwaye uchanekile.Uyilo lolawulo olukude luzisa lula ekusebenzeni kwaye luqinisekisa ukhuseleko lwabasebenzisi.
2. I-clamp yomatshini wokufunxa i-vacuum ithatha ipleyiti yokufunxa evela kumazwe angaphandle, kunye ne-adsorption force enamandla, ukhuseleko oluphezulu kunye nokukhuselwa kweemveliso emonakalweni.
3. I-vacuum crane inokuthwala ngokulula izinto ezinobuthathaka, ezinzima ukuziphakamisa, kunye nomphezulu ogudileyo ukuphucula ukusebenza kakuhle, ukunciphisa amandla abasebenzi kunye nokugcina iindleko zeshishini.
